三、代表性科研成果:
代表性论文: 1. Jialong Guo, Lihao Sun, Ying Wang, Tao Wei*, Bo Liu. High-resolution direct laser writing nanolithography enabled by oxidation-mediated corrosion selectivity in N-doped Sb heat-mode resists. Journal of Materials Chemistry C, 2026, 14: 3941-3953. 2. Zhiwei Li, Tao Wei*, Lihao Sun, Jing Hu, Miao Cheng, Qianqian Liu, Ruirui Wang, Yun Ling, Wanfei Li, Bo Liu*. High-resolution multilevel reversible color printing based on Sb2S3 phase change materials, Photonics Research, 2025, 13(3): 661-670. 3. Qianchen Liu, Tao Wei*, Yonghui Zheng, Chuantao Xuan, Lihao Sun, Jing Hu, Miao Cheng, Qianqian Liu, Ruirui Wang, Wanfei Li, Yan Cheng, Bo Liu. Picosecond operation of optoelectronic hybrid phase change memory based on Si‐doped Sb films. Advanced Functional Materials, 2025, 35(11): 2417128. 4. Lei Chen, Jinhan Yao, Tao Wei*, Jing Hu, Miao Cheng, Qianqian Liu, Ruirui Wang, Yun Ling, Wanfei Li, Bo Liu. Direct laser writing dry lithography of high‐resolution micro‐/nanostructures in AgSb4Te thin film for tunable perfect absorber. Physica Status Solidi-Rapid Research Letters, 2024, 18(4): 2300430. 5. 郭嘉龙、魏涛*、魏劲松*、胡敬、程淼、刘倩倩、王瑞瑞、李宛飞、刘波*。基于相变薄膜高分辨激光直写光刻研究进展,中国激光,2024,51(12):1202410. 6. Tao Wei*, Wancheng Shen, Ying Wang, Ruirui Wang, Qianqian Liu, Miao Cheng, Wanfei Li, Jing Hu, Yun Ling, and Bo Liu*. Mechanism of corrosion selectivity of NSb2Te thin films in the H3PO4/HNO3 developer for direct laser writing nanolithography, ACS Applied Nano Materials, 2023, 6(13): 12200-12210. 7. Ben Wu, Tao Wei*, Jing Hu, Ruirui Wang, Qianqian Liu, Miao Cheng, Wanfei Li, Yun Ling, and Bo Liu*. Thermal stability and high speed for optoelectronic hybrid phase-change memory based on Cr doped Ge2Sb2Te5 thin film, Ceramics International, 2023, 49(23): 37837-37848. 8. Ben Wu, Tao Wei*, Qianchen Liu, Yan Cheng, Yonghui Zheng, Ruirui Wang, Qianqian Liu, Miao Cheng, Wanfei Li, Jing Hu, Yun Ling, and Bo Liu*. Ultrafast SET/RESET operation for optoelectronic hybrid phase-change memory device cells based on Ge2Sb2Te5 material using partial crystallization strategy, Applied Physics Letters, 2023, 123(19): 191110. 9. Tao Wei*, Wancheng Shen, Miao Cheng, Wanfei Li, Lei Chen, Ying Wang, Jing Hu, Qianqian Liu, Yun Ling, Jingsong Wei, Bo Liu*. Corrosion selectivity and structural evolution in N doped Sb2Te thin films for lithography application, Journal of Alloys and Compounds, 2022, 920: 166067. 10. Tao Wei, Bo Liu*, Wanfei Li, Yun Ling, Jing Hu, Jingsong Wei. Direct laser printing color images based on the microstructure modulation of phase change material, Optics & Laser Technology, 2021, 138: 106895. 11. Xingwang Chen, Lei Chen, Ying Wang, Tao Wei*, Jing Hu, Miao Cheng, Qianqian Liu*, Wanfei Li, Yun Ling, and Bo Liu*. AgGeSbTe thin film as a negative heat-mode resist for dry lithography, Chinese Optics Letters, 2022, 20(3): 031601. 代表性授权专利: 1. 魏涛、沈万成、刘波、陈星、陈兴旺、程淼、胡敬、刘倩倩、李宛飞、凌云。一种实现正负性转换的NSb2Te光刻胶制备及其光刻方法,专利号:ZL 202110418028.7,申请日期:2021-4-19,授权公告日:2022-7-26 2. 魏涛、刘波、魏劲松、凌云、李宛飞、刘倩倩、程淼、胡敬。一种相变-热分解型复合光刻胶的纳米光刻方法,专利号:ZL 202010305390.9,申请日期:2020-4-17,授权公告日:2022-8-26 3. 魏涛、刘波、李宛飞、凌云、胡敬、程淼、刘倩倩。基于激光直写金属掺杂Sb2Te薄膜的自干涉曝光方法,专利号:ZL 202010245207.0,申请日期:2020-3-31,授权公告日:2023-3-14 4. 魏涛、魏劲松、刘波。基于干式显影和金属掺杂Sb2Te光刻胶的光刻方法,专利号:ZL 201911325058.2,申请日期:2019-12-20,授权公告日:2023-5-12 5. 魏涛、魏劲松、刘波。基于相变材料的无油墨激光彩色打印方法,专利号:ZL 201910893689.8,申请日期:2019-9-20,授权公告日:2021-2-19 代表性科研项目: 1. 国家自然科学基金青年项目,锑碲薄膜非线性效应精准调控瞬态热探针及其激光直写纳米光刻研究(62205231),2023.1-2025.12,30万,主持 2. 江苏省自然科学基金青年项目,SbTe基薄膜相变潜热特性诱导透明薄膜纳米光刻的机理研究(BK20190935),2019.7-2022.6,20万,主持 3. 信息功能材料国家重点实验室开放课题,Cr掺杂相变存储材料超快相变机理研究,2019.7-2021.6,10万,主持 4. 江苏省高等学校自然科学研究面上项目,Cr-Sb2Te3薄膜相变潜热诱导ZnS-SiO2纳米光刻的机理研究(19KJB510012),2019.9-2021.8,5万,主持 5. 高密光盘金属氧化物记录材料开发合作项目(TC20230321027),华为技术有限公司,2023.4 -2024.12,159.65万,参与 6.干法显影及高透明氧化物材料研究技术合作项目(TC20210706027),华为技术有限公司,2021.7-2022.9,100.34万,参与
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